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Ultraprecise Surface Processing by Etching with Laser-Induc..:

, In: Springer Series in Optical Sciences; Ultrafast Laser Nanostructuring,
Ehrhardt, Martin ; Lorenz, Pierre ; Zimmer, Klaus - p. 653-689 , 2023
Link: https://doi.org/10.1007/978-3-031-14752-4_18