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1 Ergebnisse
1
Theoretical and Experimental Research on Step Coverage Opti..:
, In:
International Conference on Reliable Systems Engineering (ICoRSE) - 2022; Lecture Notes in Networks and Systems
,
Ionascu, Georgeta
;
Manea, Elena
;
Cernica, Ileana
. - p. 185-202 , 2022
Link:
https://doi.org/10.1007/978-3-031-15944-2_18
RT T1 <cTitle>International Conference on Reliable Systems Engineering (ICoRSE) - 2022; Lecture Notes in Networks and Systems</cTitle>: T1 <Title>Theoretical and Experimental Research on Step Coverage Optimization for Integrated Microstructures of Thin Films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-3-031-15944-2_18&Exemplar=1&LAN=DE A1 Ionascu, Georgeta A1 Manea, Elena A1 Cernica, Ileana A1 Moraru, Edgar PB Springer International Publishing YR 2022 SP 185 OP 202 LK http://dx.doi.org/https://doi.org/10.1007/978-3-031-15944-2_18 DO https://doi.org/10.1007/978-3-031-15944-2_18 SF ELIB - SuUB Bremen
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