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1 Ergebnisse
1
Deep Grooves in Borofloat Glass by Wet Bulk Micromachining:
, In:
Microactuators, Microsensors and Micromechanisms; Mechanisms and Machine Science
,
Nigam, Adarsh
;
Veerla, Swarnalatha
;
Pal, Prem
- p. 290-295 , 2022
Link:
https://doi.org/10.1007/978-3-031-20353-4_24
RT T1 <cTitle>Microactuators, Microsensors and Micromechanisms; Mechanisms and Machine Science</cTitle>: T1 <Title>Deep Grooves in Borofloat Glass by Wet Bulk Micromachining</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-3-031-20353-4_24&Exemplar=1&LAN=DE A1 Nigam, Adarsh A1 Veerla, Swarnalatha A1 Pal, Prem PB Springer International Publishing YR 2022 SP 290 OP 295 LK http://dx.doi.org/https://doi.org/10.1007/978-3-031-20353-4_24 DO https://doi.org/10.1007/978-3-031-20353-4_24 SF ELIB - SuUB Bremen
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