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The Classification of Wafer Defects: A Support Vector Machi..:

, In: Robot Intelligence Technology and Applications 7; Lecture Notes in Networks and Systems,
Xuen, Lim Shi ; Mohd Khairuddin, Ismail ; Mohd Razman, Mohd Azraai... - p. 304-309 , 2023
Link: https://doi.org/10.1007/978-3-031-26889-2_27