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Deposition and Characterization of Magnetron Sputtered AlN ..:

, In: Advanced Structured Materials; Advances in Linear and Nonlinear Continuum and Structural Mechanics,
Nikolaev, Andrey L. ; Sadyrin, Evgeniy V. ; Kharchevnikov, Ivan O.... - p. 357-367 , 2023
Link: https://doi.org/10.1007/978-3-031-43210-1_20