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Research on Capacitive Micromachined Ultrasonic Transducer ..:

, In: Lecture Notes in Mechanical Engineering; Proceedings of the 3rd Annual International Conference on Material, Machines and Methods for Sustainable Development (MMMS2022),
Bui, Gia-Thinh - p. 107-116 , 2024
Link: https://doi.org/10.1007/978-3-031-57460-3_12