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1 Ergebnisse
1
A Novel Method of Rotational Error Analysis of Rotary Stage..:
, In:
Proceedings of the 38th International MATADOR Conference
,
Li, Yi-Tsung
;
Fan, Kuang-Chao
- p. 661-669 , 2022
Link:
https://doi.org/10.1007/978-3-319-64943-6_49
RT T1 <cTitle>Proceedings of the 38th International MATADOR Conference</cTitle>: T1 <Title>A Novel Method of Rotational Error Analysis of Rotary Stages Based on Abbe Principle</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-3-319-64943-6_49&Exemplar=1&LAN=DE A1 Li, Yi-Tsung A1 Fan, Kuang-Chao PB Springer International Publishing YR 2022 SP 661 OP 669 LK http://dx.doi.org/https://doi.org/10.1007/978-3-319-64943-6_49 DO https://doi.org/10.1007/978-3-319-64943-6_49 SF ELIB - SuUB Bremen
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