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Study on the Fabrication Process of a MEMS Bistable Energy ..:

, In: Conference Proceedings of the Society for Experimental Mechanics Series; Mechanics of Biological Systems & Micro-and Nanomechanics, Volume 4,
Derakhshani, Masoud ; Allgeier, Brian E. ; Berfield, Thomas A. - p. 75-79 , 2018
Link: https://doi.org/10.1007/978-3-319-95062-4_17