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1 Ergebnisse
1
Evaluation of SPM for LSI Devices:
, In:
Roadmap of Scanning Probe Microscopy; NanoScience and Technology
,
Usuda, Koji
;
Furukawa, Takashi
;
Kadota, Yasushi
- p. 139-150 , 2007
Link:
https://doi.org/10.1007/978-3-540-34315-8_19
RT T1 <cTitle>Roadmap of Scanning Probe Microscopy; NanoScience and Technology</cTitle>: T1 <Title>Evaluation of SPM for LSI Devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-3-540-34315-8_19&Exemplar=1&LAN=DE A1 Usuda, Koji A1 Furukawa, Takashi A1 Kadota, Yasushi PB Springer Berlin Heidelberg YR 2007 SP 139 OP 150 LK http://dx.doi.org/https://doi.org/10.1007/978-3-540-34315-8_19 DO https://doi.org/10.1007/978-3-540-34315-8_19 SF ELIB - SuUB Bremen
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