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Optical Plasma Diagnostics During Reactive Magnetron Sputte..:

, In: Reactive Sputter Deposition; Springer Series in Materials Science,
Konstantinidis, Stephanos ; Gaboriau, F. ; Gaillard, M... - p. 301-335 , 2008
Link: https://doi.org/10.1007/978-3-540-76664-3_9