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CMOS-MEMS:

, In: Encyclopedia of Nanotechnology,

Peroulis, Dimitrios ; Waghmare, Prashant R. ; Mitra, Sushanta K.... - p. 456-456 , 2012

Link: https://doi.org/10.1007/978-90-481-9751-4_100142

RT 
T1 <cTitle>Encyclopedia of Nanotechnology</cTitle>: T1 <Title>CMOS-MEMS</Title>

UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-90-481-9751-4_100142&Exemplar=1&LAN=DE
				
A1 Peroulis, Dimitrios
A1 Waghmare, Prashant R.
A1 Mitra, Sushanta K.
A1 Manakasettharn, Supone
A1 Taylor, J. Ashley
A1 Krupenkin, Tom N.
A1 Zhu, Wenguang
A1 Nessim, Gilbert Daniel
A1 Marano, Francelyne
A1 Guadagnini, Rina
A1 Rodrigues-Lima, Fernando
A1 Dupret, Jean-Marie
A1 Baeza-Squiban, Armelle
A1 Boland, Sonja
A1 Park, Jeong Young
A1 Oh, Seajin
A1 Madou, Marc
A1 Yap, Yoke Khin
A1 Aslan, Burcu
A1 Han, Hee Dong
A1 Lopez-Berestein, Gabriel
A1 Sood, Anil K.
A1 Lu, Michael S.-C.
A1 Qu, Hongwei
A1 Xie, Huikai
A1 Xie, Huikai
A1 Zhou, Ying
A1 Howell, Larry L.
A1 Conlisk, A. T.
A1 Zhigilei, Leonid V.
A1 Volkov, Alexey N.
A1 Dongare, Avinash M.
A1 Yin, Zheng
A1 Fan, Yubo
A1 Wong, Stephen TC
A1 Nandigana, Vishal V. R.
A1 Aluru, N. R.
A1 Li, Weicong
A1 Kwok, Harry
A1 Wannemacher, Reinhold
PB Springer Netherlands
YR 2012
SP 456
OP 456
LK http://dx.doi.org/https://doi.org/10.1007/978-90-481-9751-4_100142
DO https://doi.org/10.1007/978-90-481-9751-4_100142
SF ELIB - SuUB Bremen

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