Titel

Merkliste
1 Ergebnisse

EUV Lithography:

, In: Encyclopedia of Nanotechnology,

Auffan, Mélanie ; Santaella, Catherine ; Thiéry, Alain... - p. 797-803 , 2012

Link: https://doi.org/10.1007/978-90-481-9751-4_391

RT 
T1 <cTitle>Encyclopedia of Nanotechnology</cTitle>: T1 <Title>EUV Lithography</Title>

UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-90-481-9751-4_391&Exemplar=1&LAN=DE
				
A1 Auffan, Mélanie
A1 Santaella, Catherine
A1 Thiéry, Alain
A1 Paillès, Christine
A1 Rose, Jérôme
A1 Achouak, Wafa
A1 Thill, Antoine
A1 Masion, Armand
A1 Wiesner, Mark
A1 Bottero, Jean-Yves
A1 Mouchet, Florence
A1 Landois, Périne
A1 Bourdiol, Floriane
A1 Fourquaux, Isabelle
A1 Puech, Pascal
A1 Flahaut, Emmanuel
A1 Gauthier, Laury
A1 Rybak-Smith, Malgorzata J.
A1 Song, Youngjun
A1 Heller, Michael J.
A1 Holmes, David
A1 Webb, Benjamin L. J.
A1 Sun, Tao
A1 Mayer, Theresa S.
A1 Mayer, Jeffrey S.
A1 Keating, Christine D.
A1 Ghosh, Amitabha
A1 Pobelov, Ilya V.
A1 Li, Chen
A1 Wandlowski, Thomas
A1 Helander, Michael G.
A1 Wang, Zhibin
A1 Lu, Zheng-Hong
A1 Carpino, Francesca
A1 Gibson, Larry R.
A1 Grismer, Dane A.
A1 Bohn, Paul W.
A1 Pala, Nezih
A1 Karabiyik, Mustafa
A1 Porter, Alexandra
A1 McGuire, Eva
A1 Xie, Guoqiang
A1 Lopez-Bezanilla, Alejandro
A1 Roche, Stephan
A1 Cruz-Silva, Eduardo
A1 Sumpter, Bobby G.
A1 Meunier, Vincent
A1 Laudenslager, Michael J.
A1 Sigmund, Wolfgang M.
A1 Hall, Neal A.
A1 Kim, CJ
A1 Wang, Guoxing
A1 Greenberg, Robert J.
A1 Mbanaso, Chimaobi
A1 Denbeaux, Gregory
A1 Coutris, Claire
A1 Joner, Erik J.
PB Springer Netherlands
YR 2012
SP 797
OP 803
LK http://dx.doi.org/https://doi.org/10.1007/978-90-481-9751-4_391
DO https://doi.org/10.1007/978-90-481-9751-4_391
SF ELIB - SuUB Bremen

Export

RefWorks (nur Desktop-Version!)
Flow (Zuerst in Flow einloggen, dann importieren)