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Multilayer PECVD Si–C–N Films:

, In: Springer Proceedings in Physics; Microstructure and Properties of Micro- and Nanoscale Materials, Films, and Coatings (NAP 2019),
Kozak, A. O. ; Ivashchenko, V. I. ; Porada, O. K.... - p. 397-404 , 2020
Link: https://doi.org/10.1007/978-981-15-1742-6_39