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Design and Simulation of Single-Axis MEMS Accelerometer for..:

, In: Lecture Notes on Multidisciplinary Industrial Engineering; Advances in Structures, Systems and Materials,
Rudresh, K. J. ; Gopalakrishna, Kin ; Bharath Gowda, K... - p. 199-209 , 2020
Link: https://doi.org/10.1007/978-981-15-3254-2_19