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Study of 3D Hexagonal Membrane Structure for MEMS-Based Ult..:

, In: Lecture Notes in Mechanical Engineering; Proceedings of ICDMC 2019,
Maity, Reshmi ; Maity, N. P. ; Guha, K.... - p. 199-209 , 2020
Link: https://doi.org/10.1007/978-981-15-3631-1_19