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Design and Analysis of a Capacitive MEMS Accelerometer as a..:

, In: Studies in Systems, Decision and Control; Modern Techniques in Biosensors,
Preeti, M. ; Guha, Koushik ; Baishnab, K. L.. - p. 37-61 , 2021
Link: https://doi.org/10.1007/978-981-15-9612-4_2