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Design and Analysis of MEMS Microphone Using Helical Spring:

, In: Communications in Computer and Information Science; Communication, Networks and Computing,
Sharma, Mayank ; Tomar, Ranjeet Singh ; Dhakad, Bhupendra... - p. 331-342 , 2021
Link: https://doi.org/10.1007/978-981-16-8896-6_27