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Synthesis and Characterization of Ta/TaN Coatings with CFUB..:

, In: Proceeding of 5th International Conference on Advances in Manufacturing and Materials Engineering; Lecture Notes in Mechanical Engineering,
Polat, Muhammed Alperen ; Gülten, Gökhan ; Totik, Yaşar... - p. 273-279 , 2023
Link: https://doi.org/10.1007/978-981-19-9509-5_37