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Ultrasensitive Reduced Vanadium Dioxide-Based MEMS Pirani G..:

, In: Springer Proceedings in Physics; The Physics of Semiconductor Devices,
Garg, Manu ; Joshi, Khanjan ; Arya, Dhairya S.... - p. 311-318 , 2024
Link: https://doi.org/10.1007/978-981-97-1571-8_37