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1 Ergebnisse
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Determination of Main Parameters of Air Floating Support Sy..:
, In:
Proceedings of 2023 the 6th International Conference on Mechanical Engineering and Applied Composite Materials; Mechanisms and Machine Science
,
Wang, Xuejian
;
Ma, Yunjie
;
Xu, Zhi
.. - p. 261-272 , 2024
Link:
https://doi.org/10.1007/978-981-97-1678-4_26
RT T1
Proceedings of 2023 the 6th International Conference on Mechanical Engineering and Applied Composite Materials; Mechanisms and Machine Science
: T1
Determination of Main Parameters of Air Floating Support System for Liquid Crystal Glass Substrate and Its Influence on Micro-Vibration of Glass Substrate
UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-981-97-1678-4_26&Exemplar=1&LAN=DE A1 Wang, Xuejian A1 Ma, Yunjie A1 Xu, Zhi A1 Huang, Bin A1 Yang, Yongyue PB Springer Nature Singapore YR 2024 SP 261 OP 272 LK http://dx.doi.org/https://doi.org/10.1007/978-981-97-1678-4_26 DO https://doi.org/10.1007/978-981-97-1678-4_26 SF ELIB - SuUB Bremen
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