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Fabrication and Characterization of E-Beam Deposited Copper..:

, In: Lecture Notes in Electrical Engineering; Micro and Nanoelectronics Devices, Circuits and Systems,
Surjit Singh, Salam ; Shougaijam, Biraj ; Khelchand Singh, Naorem - p. 151-158 , 2023
Link: https://doi.org/10.1007/978-981-99-4495-8_11