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Studies of GaAs surface roughness and organic masks resista..:
Walkow, B.
;
Loeb, H. W.
;
Freisinger, J.
.
Fresenius' Journal of Analytical Chemistry. 341 (1991) 3-4 - p. 248-250 , 1991
Link:
https://doi.org/10.1007/bf00321557
RT Journal T1 <Title>Studies of GaAs surface roughness and organic masks resistance depending on the ion-beam energy</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_bf00321557&Exemplar=1&LAN=DE A1 Walkow, B. A1 Loeb, H. W. A1 Freisinger, J. A1 M��ner, C. PB Springer Science and Business Media LLC YR 1991 SN 0937-0633 SN 1618-2650 JF Fresenius' Journal of Analytical Chemistry VO 341 IS 3-4 SP 248 OP 250 LK http://dx.doi.org/https://doi.org/10.1007/bf00321557 DO https://doi.org/10.1007/bf00321557 SF ELIB - SuUB Bremen
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