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Ion beam exposure of resists: I. Statistical limitations:
Ryssel, H.
;
Prinke, G.
;
Bernt, H.
..
Applied Physics A Solids and Surfaces. 27 (1982) 4 - p. 239-241 , 1982
Link:
https://doi.org/10.1007/bf00619085
RT Journal T1 <Title>Ion beam exposure of resists: I. Statistical limitations</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_bf00619085&Exemplar=1&LAN=DE A1 Ryssel, H. A1 Prinke, G. A1 Bernt, H. A1 Haberger, K. A1 Hoffmann, K. PB Springer Science and Business Media LLC YR 1982 SN 0721-7250 SN 1432-0630 JF Applied Physics A Solids and Surfaces VO 27 IS 4 SP 239 OP 241 LK http://dx.doi.org/https://doi.org/10.1007/bf00619085 DO https://doi.org/10.1007/bf00619085 SF ELIB - SuUB Bremen
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