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1 Ergebnisse
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Focused ion beam gallium implantation into silicon:
Tamura, M.
;
Shukuri, S.
;
Moniwa, M.
.
Applied Physics A Solids and Surfaces. 39 (1986) 3 - p. 183-190 , 1986
Link:
https://doi.org/10.1007/bf00620733
RT Journal T1 <Title>Focused ion beam gallium implantation into silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_bf00620733&Exemplar=1&LAN=DE A1 Tamura, M. A1 Shukuri, S. A1 Moniwa, M. A1 Default, M. PB Springer Science and Business Media LLC YR 1986 SN 0721-7250 SN 1432-0630 JF Applied Physics A Solids and Surfaces VO 39 IS 3 SP 183 OP 190 LK http://dx.doi.org/https://doi.org/10.1007/bf00620733 DO https://doi.org/10.1007/bf00620733 SF ELIB - SuUB Bremen
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