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1 Ergebnisse
1
Effects of annealing conditions on the properties of tantal..:
Park, S. W.
;
Baek, Y. K.
;
Lee, J. Y.
..
Journal of Electronic Materials. 21 (1992) 6 - p. 635-639 , 1992
Link:
https://doi.org/10.1007/bf02655432
RT Journal T1 <Title>Effects of annealing conditions on the properties of tantalum oxide films on silicon substrates</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_bf02655432&Exemplar=1&LAN=DE A1 Park, S. W. A1 Baek, Y. K. A1 Lee, J. Y. A1 Park, C. O. A1 Im, H. B. PB Springer Science and Business Media LLC YR 1992 SN 0361-5235 SN 1543-186X JF Journal of Electronic Materials VO 21 IS 6 SP 635 OP 639 LK http://dx.doi.org/https://doi.org/10.1007/bf02655432 DO https://doi.org/10.1007/bf02655432 SF ELIB - SuUB Bremen
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