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Al, Al/C and Al/Si implantations in 6H-SiC:
Rao, Mulpuri V.
;
Griffiths, Peter
;
Gardner, Jason
...
Journal of Electronic Materials. 25 (1996) 1 - p. 75-80 , 1996
Link:
https://doi.org/10.1007/bf02666177
RT Journal T1 <Title>Al, Al/C and Al/Si implantations in 6H-SiC</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_bf02666177&Exemplar=1&LAN=DE A1 Rao, Mulpuri V. A1 Griffiths, Peter A1 Gardner, Jason A1 Holland, O. W. A1 Ghezzo, M. A1 Kretchmer, J. A1 Kelner, G. A1 Freitas, J. A. PB Springer Science and Business Media LLC YR 1996 SN 0361-5235 SN 1543-186X JF Journal of Electronic Materials VO 25 IS 1 SP 75 OP 80 LK http://dx.doi.org/https://doi.org/10.1007/bf02666177 DO https://doi.org/10.1007/bf02666177 SF ELIB - SuUB Bremen
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