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1 Ergebnisse
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Dry etching of SrBi2Ta2O9: Comparison of inductively couple..:
Park, Jin Su
;
Kim, Tae Hee
;
Choi, Chang Sun
.
Korean Journal of Chemical Engineering. 19 (2002) 3 - p. 486-490 , 2002
Link:
https://doi.org/10.1007/bf02697161
RT Journal T1 <Title>Dry etching of SrBi2Ta2O9: Comparison of inductively coupled plasma chemistries</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_bf02697161&Exemplar=1&LAN=DE A1 Park, Jin Su A1 Kim, Tae Hee A1 Choi, Chang Sun A1 Hahn, Yoon-Bong PB Springer Science and Business Media LLC YR 2002 SN 0256-1115 SN 1975-7220 JF Korean Journal of Chemical Engineering VO 19 IS 3 SP 486 OP 490 LK http://dx.doi.org/https://doi.org/10.1007/bf02697161 DO https://doi.org/10.1007/bf02697161 SF ELIB - SuUB Bremen
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