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A novel stylus profiler without nonlinearity and parasitic ..:
Jung, Hyun Soo
;
Hong, Min-Sung
;
Lee, Soo -Hun
...
Journal of Mechanical Science and Technology. 21 (2007) 10 - p. 1491-1497 , 2007
Link:
https://doi.org/10.1007/bf03177364
RT Journal T1 <Title>A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_bf03177364&Exemplar=1&LAN=DE A1 Jung, Hyun Soo A1 Hong, Min-Sung A1 Lee, Soo -Hun A1 Park, June Ho A1 Kang, Dongwoo A1 Lee, Moon G. PB Springer Science and Business Media LLC YR 2007 SN 1738-494X JF Journal of Mechanical Science and Technology VO 21 IS 10 SP 1491 OP 1497 LK http://dx.doi.org/https://doi.org/10.1007/bf03177364 DO https://doi.org/10.1007/bf03177364 SF ELIB - SuUB Bremen
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