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Dynamic mechanical properties of photo resist thin films:
Chang, Rwei -Ching
;
Chen, Feng -Yuan
;
Yang, PaoHsiang
Journal of Mechanical Science and Technology. 21 (2007) 10 - p. 1739-1744 , 2007
Link:
https://doi.org/10.1007/bf03177403
RT Journal T1 <Title>Dynamic mechanical properties of photo resist thin films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_bf03177403&Exemplar=1&LAN=DE A1 Chang, Rwei -Ching A1 Chen, Feng -Yuan A1 Yang, PaoHsiang PB Springer Science and Business Media LLC YR 2007 SN 1738-494X JF Journal of Mechanical Science and Technology VO 21 IS 10 SP 1739 OP 1744 LK http://dx.doi.org/https://doi.org/10.1007/bf03177403 DO https://doi.org/10.1007/bf03177403 SF ELIB - SuUB Bremen
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