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Estimation method for errors of an aerostatic planar XY sta..:
Hwang, Jooho
;
Park, Chun-Hong
;
Kim, Seung-Woo
The International Journal of Advanced Manufacturing Technology. 46 (2009) 9-12 - p. 877-883 , 2009
Link:
https://doi.org/10.1007/s00170-009-2008-9
RT Journal T1
Estimation method for errors of an aerostatic planar XY stage based on measured profiles errors
UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00170-009-2008-9&Exemplar=1&LAN=DE A1 Hwang, Jooho A1 Park, Chun-Hong A1 Kim, Seung-Woo PB Springer Science and Business Media LLC YR 2009 SN 0268-3768 SN 1433-3015 JF The International Journal of Advanced Manufacturing Technology VO 46 IS 9-12 SP 877 OP 883 LK http://dx.doi.org/https://doi.org/10.1007/s00170-009-2008-9 DO https://doi.org/10.1007/s00170-009-2008-9 SF ELIB - SuUB Bremen
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