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A state-of-the-art review of ductile cutting of silicon waf..:

Arif, Muhammad ; Rahman, Mustafizur ; San, Wong Yoke
The International Journal of Advanced Manufacturing Technology.  63 (2012)  5-8 - p. 481-504 , 2012
Link: https://doi.org/10.1007/s00170-012-3937-2