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Characterization of 4H-SiC (0001) surface processed by plas..:

Deng, Hui ; Ueda, Masaki ; Yamamura, Kazuya
The International Journal of Advanced Manufacturing Technology.  72 (2012)  1-4 - p. 1-7 , 2012
Link: https://doi.org/10.1007/s00170-012-4430-7