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Chemical mechanical paired grinding: a tool for multi-wavel..:

Chandra, Abhijit ; Bastawros, Ashraf F. ; Yu, Tianyu.
The International Journal of Advanced Manufacturing Technology.  89 (2016)  1-4 - p. 611-617 , 2016
Link: https://doi.org/10.1007/s00170-016-9085-3