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Study on diamond dressing for non-uniformity of pad surface..:
Chen, Chao-Chang A.
;
Pham, Quoc-Phong
The International Journal of Advanced Manufacturing Technology. 91 (2017) 9-12 - p. 3573-3582 , 2017
Link:
https://doi.org/10.1007/s00170-017-0060-4
RT Journal T1 <Title>Study on diamond dressing for non-uniformity of pad surface topography in CMP process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00170-017-0060-4&Exemplar=1&LAN=DE A1 Chen, Chao-Chang A. A1 Pham, Quoc-Phong PB Springer Science and Business Media LLC YR 2017 SN 0268-3768 SN 1433-3015 JF The International Journal of Advanced Manufacturing Technology VO 91 IS 9-12 SP 3573 OP 3582 LK http://dx.doi.org/https://doi.org/10.1007/s00170-017-0060-4 DO https://doi.org/10.1007/s00170-017-0060-4 SF ELIB - SuUB Bremen
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