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Characterization analysis of 532 nm laser drilling of silic..:

Lin, Che-Shu ; Tai, Chih-Ho ; Chen, Rou-Jhen...
The International Journal of Advanced Manufacturing Technology.  123 (2022)  9-10 - p. 3699-3710 , 2022
Link: https://doi.org/10.1007/s00170-022-10425-7