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Understanding the mechanism of ultrasonic vibration-assiste..:
Kurniawan, Rendi
;
Chen, Shuo
;
Xu, Moran
...
The International Journal of Advanced Manufacturing Technology. 132 (2024) 3-4 - p. 1283-1313 , 2024
Link:
https://doi.org/10.1007/s00170-024-13412-2
RT Journal T1 <Title>Understanding the mechanism of ultrasonic vibration-assisted drilling (UVAD) for micro-hole formation on silicon wafers using numerical and analytical techniques</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00170-024-13412-2&Exemplar=1&LAN=DE A1 Kurniawan, Rendi A1 Chen, Shuo A1 Xu, Moran A1 Teng, Hanwei A1 Chen, Jielin A1 Ali, Saood A1 Han, Pil-Wan A1 Kiswanto, Gandjar A1 Kumaran, Sundaresan Thirumalai A1 Ko, Tae Jo PB Springer Science and Business Media LLC YR 2024 SN 0268-3768 SN 1433-3015 JF The International Journal of Advanced Manufacturing Technology VO 132 IS 3-4 SP 1283 OP 1313 LK http://dx.doi.org/https://doi.org/10.1007/s00170-024-13412-2 DO https://doi.org/10.1007/s00170-024-13412-2 SF ELIB - SuUB Bremen
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