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1 Ergebnisse
1
Application of high resolution-ICP-MS (sector field-ICP-MS)..:
Wildner, H.
;
Hearn, Ruth
Fresenius' Journal of Analytical Chemistry. 360 (1998) 7-8 - p. 800-803 , 1998
Link:
https://doi.org/10.1007/s002160050811
RT Journal T1 <Title>Application of high resolution-ICP-MS (sector field-ICP-MS) to the fast and sensitive quality control of process chemicals in semiconductor manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s002160050811&Exemplar=1&LAN=DE A1 Wildner, H. A1 Hearn, Ruth PB Springer Science and Business Media LLC YR 1998 SN 0937-0633 SN 1432-1130 JF Fresenius' Journal of Analytical Chemistry VO 360 IS 7-8 SP 800 OP 803 LK http://dx.doi.org/https://doi.org/10.1007/s002160050811 DO https://doi.org/10.1007/s002160050811 SF ELIB - SuUB Bremen
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