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Fabrication of submicron gratings in fused silica by F 2 -l..:

Ihlemann, J. ; Müller, S. ; Puschmann, S....
Applied Physics A: Materials Science & Processing.  76 (2003)  5 - p. 751-753 , 2003
Link: https://doi.org/10.1007/s00339-002-1467-8