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Adjusting chemical bonding of hard amorphous CSi x N y thin..:

Thärigen, T. ; Lorenz, M. ; Koivusaari, K.J....
Applied Physics A: Materials Science & Processing.  69 (1999)  7 - p. S899-S903 , 1999
Link: https://doi.org/10.1007/s003390051555