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1 Ergebnisse
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Deep reinforcement learning framework for end-to-end semico..:
Hirtz, Thomas
;
Tian, He
;
Shahzad, Shazrah
...
Neural Computing and Applications. 36 (2024) 20 - p. 12443-12460 , 2024
Link:
https://doi.org/10.1007/s00521-024-09710-1
RT Journal T1 <Title>Deep reinforcement learning framework for end-to-end semiconductor process control</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00521-024-09710-1&Exemplar=1&LAN=DE A1 Hirtz, Thomas A1 Tian, He A1 Shahzad, Shazrah A1 Wu, Fan A1 Yang, Yi A1 Ren, Tian-Ling PB Springer Science and Business Media LLC YR 2024 SN 0941-0643 SN 1433-3058 JF Neural Computing and Applications VO 36 IS 20 SP 12443 OP 12460 LK http://dx.doi.org/https://doi.org/10.1007/s00521-024-09710-1 DO https://doi.org/10.1007/s00521-024-09710-1 SF ELIB - SuUB Bremen
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