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Metrology of high aspect ratio MEMS:
Nichols, J. F.
;
Kurfess, T. R.
Microsystem Technologies. 10 (2004) 6-7 - p. 556-559 , 2004
Link:
https://doi.org/10.1007/s00542-004-0393-4
RT Journal T1 <Title>Metrology of high aspect ratio MEMS</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00542-004-0393-4&Exemplar=1&LAN=DE A1 Nichols, J. F. A1 Kurfess, T. R. PB Springer Science and Business Media LLC YR 2004 SN 0946-7076 SN 1432-1858 JF Microsystem Technologies VO 10 IS 6-7 SP 556 OP 559 LK http://dx.doi.org/https://doi.org/10.1007/s00542-004-0393-4 DO https://doi.org/10.1007/s00542-004-0393-4 SF ELIB - SuUB Bremen
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