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1 Ergebnisse
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A novel approach for MEMS with galvanic protection on SOI w..:
Wei, Wenshan
;
You, Weilong
;
Zhao, Wei
...
Microsystem Technologies. 21 (2014) 9 - p. 1959-1965 , 2014
Link:
https://doi.org/10.1007/s00542-014-2312-7
RT Journal T1
A novel approach for MEMS with galvanic protection on SOI wafer
UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00542-014-2312-7&Exemplar=1&LAN=DE A1 Wei, Wenshan A1 You, Weilong A1 Zhao, Wei A1 Yu, Zhengyin A1 Pang, Jun A1 Yang, Heng PB Springer Science and Business Media LLC YR 2014 SN 0946-7076 SN 1432-1858 JF Microsystem Technologies VO 21 IS 9 SP 1959 OP 1965 LK http://dx.doi.org/https://doi.org/10.1007/s00542-014-2312-7 DO https://doi.org/10.1007/s00542-014-2312-7 SF ELIB - SuUB Bremen
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