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Development of a 2D array of micromachined electromagnetic ..:
Shi, Zhichao
;
Bélier, Benoît
;
Martincic, Emile
...
Microsystem Technologies. 24 (2017) 1 - p. 411-417 , 2017
Link:
https://doi.org/10.1007/s00542-017-3320-1
RT Journal T1
Development of a 2D array of micromachined electromagnetic digital actuators for micro-conveyance applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00542-017-3320-1&Exemplar=1&LAN=DE A1 Shi, Zhichao A1 Bélier, Benoît A1 Martincic, Emile A1 Petit, Laurent A1 Moulin, Johan A1 Lefeuvre, Elie A1 Terrien, Jérémy A1 Prelle, Christine A1 Lamarque, Frédéric PB Springer Science and Business Media LLC YR 2017 SN 0946-7076 SN 1432-1858 JF Microsystem Technologies VO 24 IS 1 SP 411 OP 417 LK http://dx.doi.org/https://doi.org/10.1007/s00542-017-3320-1 DO https://doi.org/10.1007/s00542-017-3320-1 SF ELIB - SuUB Bremen
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