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1 Ergebnisse
1
In-line inspection of surface feature and defect:
Ye, Ruifang
;
Pan, Chia-Sheng
;
Chang, Ming
.
Microsystem Technologies. 24 (2017) 8 - p. 3233-3240 , 2017
Link:
https://doi.org/10.1007/s00542-017-3678-0
RT Journal T1
In-line inspection of surface feature and defect
UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00542-017-3678-0&Exemplar=1&LAN=DE A1 Ye, Ruifang A1 Pan, Chia-Sheng A1 Chang, Ming A1 Hsieh, Chia-Ping PB Springer Science and Business Media LLC YR 2017 SN 0946-7076 SN 1432-1858 JF Microsystem Technologies VO 24 IS 8 SP 3233 OP 3240 LK http://dx.doi.org/https://doi.org/10.1007/s00542-017-3678-0 DO https://doi.org/10.1007/s00542-017-3678-0 SF ELIB - SuUB Bremen
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