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Investigations into surface topography of glass microfeatur..:
Verma, Aman Kumar
;
Mishra, Dileep Kumar
;
Pawar, Karan
.
Microsystem Technologies. 26 (2020) 6 - p. 2105-2116 , 2020
Link:
https://doi.org/10.1007/s00542-020-04770-4
RT Journal T1
Investigations into surface topography of glass microfeatures formed by pulsed electrochemical discharge milling for microsystem applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00542-020-04770-4&Exemplar=1&LAN=DE A1 Verma, Aman Kumar A1 Mishra, Dileep Kumar A1 Pawar, Karan A1 Dixit, Pradeep PB Springer Science and Business Media LLC YR 2020 SN 0946-7076 SN 1432-1858 JF Microsystem Technologies VO 26 IS 6 SP 2105 OP 2116 LK http://dx.doi.org/https://doi.org/10.1007/s00542-020-04770-4 DO https://doi.org/10.1007/s00542-020-04770-4 SF ELIB - SuUB Bremen
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