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Experiment and analysis of the effect of BCB sealing ring f..:
Seok, Seonho
Microsystem Technologies. 27 (2020) 1 - p. 263-268 , 2020
Link:
https://doi.org/10.1007/s00542-020-04945-z
RT Journal T1
Experiment and analysis of the effect of BCB sealing ring flatness on BCB cap transfer packaging
UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00542-020-04945-z&Exemplar=1&LAN=DE A1 Seok, Seonho PB Springer Science and Business Media LLC YR 2020 SN 0946-7076 SN 1432-1858 JF Microsystem Technologies VO 27 IS 1 SP 263 OP 268 LK http://dx.doi.org/https://doi.org/10.1007/s00542-020-04945-z DO https://doi.org/10.1007/s00542-020-04945-z SF ELIB - SuUB Bremen
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