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A comprehensive modeling of a 6-axis single proof mass MEMS..:
Said, Mohamed Hadj
;
Nasr, Dorra
;
Lahouar, Samer
..
Microsystem Technologies. , 2024
Link:
https://doi.org/10.1007/s00542-024-05623-0
RT Journal T1
A comprehensive modeling of a 6-axis single proof mass MEMS-based piezoelectric IMU
UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s00542-024-05623-0&Exemplar=1&LAN=DE A1 Said, Mohamed Hadj A1 Nasr, Dorra A1 Lahouar, Samer A1 Mansour, Mounir A1 Tounsi, Fares PB Springer Science and Business Media LLC YR 2024 SN 0946-7076 SN 1432-1858 JF Microsystem Technologies LK http://dx.doi.org/https://doi.org/10.1007/s00542-024-05623-0 DO https://doi.org/10.1007/s00542-024-05623-0 SF ELIB - SuUB Bremen
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