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Substrate-dependent structural evolution during the oxidati..:
Jung, Gowun
;
Kim, Sehun
;
Eom, Jiho
...
Journal of Materials Science. 59 (2024) 23 - p. 10432-10443 , 2024
Link:
https://doi.org/10.1007/s10853-024-09751-w
RT Journal T1 <Title>Substrate-dependent structural evolution during the oxidation of SiNx thin films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s10853-024-09751-w&Exemplar=1&LAN=DE A1 Jung, Gowun A1 Kim, Sehun A1 Eom, Jiho A1 Song, In Young A1 Lee, Jinhee A1 Cho, Seong-Keun A1 Lee, Wang-Eun A1 Heo, Kyuyoung A1 Cho, Tae-Yeon A1 Yun, Hwanhui PB Springer Science and Business Media LLC YR 2024 SN 0022-2461 SN 1573-4803 JF Journal of Materials Science VO 59 IS 23 SP 10432 OP 10443 LK http://dx.doi.org/https://doi.org/10.1007/s10853-024-09751-w DO https://doi.org/10.1007/s10853-024-09751-w SF ELIB - SuUB Bremen
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