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A novel selective removal process of cobalt silicide:

Bozzini, Benedetto ; D'Urzo, Lucia ; Della Pia, Marcello..
Journal of Materials Science: Materials in Electronics.  20 (2009)  12 - p. 1164-1171 , 2009
Link: https://doi.org/10.1007/s10854-008-9845-4