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1 Ergebnisse
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Deposition of highly c-axis-oriented ScAlN thin films at di..:
Tang, Jialin
;
Niu, Dongwei
;
Tai, Zhiwei
.
Journal of Materials Science: Materials in Electronics. 28 (2017) 7 - p. 5512-5517 , 2017
Link:
https://doi.org/10.1007/s10854-016-6213-7
RT Journal T1 <Title>Deposition of highly c-axis-oriented ScAlN thin films at different sputtering power</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s10854-016-6213-7&Exemplar=1&LAN=DE A1 Tang, Jialin A1 Niu, Dongwei A1 Tai, Zhiwei A1 Hu, Xianwei PB Springer Science and Business Media LLC YR 2017 SN 0957-4522 SN 1573-482X JF Journal of Materials Science: Materials in Electronics VO 28 IS 7 SP 5512 OP 5517 LK http://dx.doi.org/https://doi.org/10.1007/s10854-016-6213-7 DO https://doi.org/10.1007/s10854-016-6213-7 SF ELIB - SuUB Bremen
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